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Chair: Samira Naghdi
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9:00
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Welcome coffee
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9:30
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Analía Fernández Herrero
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PTB
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Introduction: Past adventures and future headaches using EUV and soft X-ray metrology
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10:00
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Vitaly Krasnov
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imec
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Characterization of nanostructures via scatterometry using table-top 92eV HHG source
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10:30
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Manos Kechaoglou
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ARCNL
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0th order scatterometry: Nanostructure characterization with material dynamics study capabilities
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11:00
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Break
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11:30
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Martin Hammerschmidt
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JCMwave
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Machine learning for efficient Bayesian parameter reconstruction in optical nanometrology
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12:00
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Tim Käseberg
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PTB
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Machine-Learning inspired evaluation for imaging Müller matrix ellipsometry
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12:30 (online)
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Christoph Cobet
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JKU
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tba
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13:00
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Lunch
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Chair: Richard Ciesielski
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14:00 (online)
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Erkki Ikonen
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Aalto
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PillarHall component characterization which was included in the ATMOC project
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14:30
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Silviana Pereira
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TU Delft
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A method to determine index of refraction of birefringent 2D materials
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15:00
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Maren Casfor
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PTB
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Towards improved model error correction using upper-bound optimization
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15:30
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Poster Session /Break
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16:30
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Randolf Beerwerth
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GenISys
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Challenges of SEM based Computational Metrology
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17:00 (online)
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Mark Alexander Henn (online)
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NIST
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An ensemble learning approach to hybrid and multi-modal metrology
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17:30
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Najmeh Abbasirad
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PTB
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Optics Beyond the Edge: A Deeper Look at VUV Optical Constants
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18:00
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End of Day 1
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18:30
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Dinner @ Dong A, Englische Str. 6, 10587 Berlin
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