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Quantification of Uncertainties in Nano Optical Metrology logo Quantification of Uncertainties in Nano Optical Metrology logo

QUNOM 2023

Name Institution Talk Title
Victor Soltwisch Physikalisch-Technische Bundesanstalt (PTB), Germany Between grazing exit and grazing incidence using human learning techniques
Jonas Baumann BLiX, Technical University Berlin (TUB), Germany The Application of Laboratory Scan-Free Grazing Emission X-ray Fluorescence on Semiconductor Nanostructures
Sophia Schröder RWTH Aachen, Germany Characterization of optical constants in the extreme ultraviolet with a stand-alone EUV spectrometer
Yifeng Shao Technical University, Delft, The Netherlands EUV lens less diffractive imaging with high-harmonic generation source for wafer sample characterisation
Vitaly Krasnov IMEC, Belgium Soft X-ray chemically sensitive ptychographic imaging of Atom-probe tomography tips
Atul Tiwari XUV Optics, University of Twente, The Netherlands Characterization of Strong Metal-Support Interaction (SMSI) Using X-ray Standing Wave
Maciej Jankowski ESRF, France Operando studies of graphene growth on the liquid copper
Philipp-Immanuel Schneider JCMwave (Zuse), Germany The challenges of efficient parameter reconstruction with vectorial Gaussian processes
Nando Hegemann Physikalisch-Technische Bundesanstalt (PTB), Germany Contesting the Curse of Dimensionality: Parameter Reconstruction in High Dimensions
Analía Fernández Herrero Helmholtz-Zentrum (HZB), Berlin, Germany Challenges in the production of next-generation gratings
Leonard Lohr Physikalisch-Technische Bundesanstalt (PTB), Germany Reconstruction uncertainties of nanoscale grating characterization
Antonios Pelekanidis Advanced Research Center for Nanolithography (ARCNL), Netherlands Characterization of extreme ultraviolet wavefronts using ptychography

QUNOM 2022

Name Institution Talk Title
Nando Farchmin Physikalisch-Technische Bundesanstalt (PTB), Germany High-Dimensional Uncertainty Quantification with PyThia - An Outlook
Robert Polster GenISys Computational Scanning Electron Microscopy
Konstantin Nikolaev National Research Center Kurchatov Institute (NRCKI), Russia Unnecessarily exotic approaches to the thin film metrology
Steffen Staeck Technische Universität Berlin (TUB), Germany GEXRF for the investigation of 2D nanostructures in the soft X-ray range
Nils Wauschkuhn Physikalisch-Technische Bundesanstalt (PTB), Germany Reconstruction of TiO2-HfO2 gratings with scanning-free grazing emission X-ray fluorescence
Kas Andrle Physikalisch-Technische Bundesanstalt (PTB), Germany Parameterization for the reconstruction of nanostructures
Matthias Plock Zuse Institute Berlin (ZIB), Germany A Gaussian process surrogate augmented Markov chain Monte Carlo approach for computationally efficient uncertainty quantification in expensive parameter reconstruction problems
Philipp Schneider JCMwave Bayesian parameter reconstruction and advanced FEM simulation and for high-precision dimensional microscopy
Leonhard Lohr Physikalisch-Technische Bundesanstalt (PTB), Germany Geometrical reconstruction of nanoscale gratings from soft X-ray scattering and fluorescence measurements
Mark Henn National Institute of Standards and Technology (NIST), USA Exploring the Applicability of Gaussian Process Regression in Critical Dimension Metrology
Victor Soltwisch Physikalisch-Technische Bundesanstalt (PTB), Germany X-ray nano metrology outlook: are there limits?

QUNOM 2021

Name Institution Talk Title
Robert Polster GenISys Computational Scanning Electron Microscopy
Philipp Schneider JCMwave Bayesian parameter reconstruction and advanced FEM simulation and for high-precision dimensional microscopy
Kas Andrle Physikalisch-Technische Bundesanstalt (PTB), Germany Parameterization for the reconstruction of nanostructures
Nando Farchmin Physikalisch-Technische Bundesanstalt (PTB), Germany High-Dimensional Uncertainty Quantification with PyThia - An Outlook
Victor Soltwisch Physikalisch-Technische Bundesanstalt (PTB), Germany X-ray nano metrology outlook: are there limits?
Leonhard Lohr Physikalisch-Technische Bundesanstalt (PTB), Germany ---
Nils Wauschkuhn Physikalisch-Technische Bundesanstalt (PTB), Germany Reconstruction of TiO2-HfO2 gratings with scanning-free grazing emission X-ray fluorescence
Steffen Staeck Technische Universität Berlin (TUB), Germany GEXRF for the investigation of 2D nanostructures in the soft X-ray range
Matthias Plock Zuse Institute Berlin (ZIB), Germany A Gaussian process surrogate augmented Markov chain Monte Carlo approach for computationally efficient uncertainty quantification in expensive parameter reconstruction problems
Mark Henn National Institute of Standards and Technology (NIST), USA Exploring the Applicability of Gaussian Process Regression in Critical Dimension Metrology
Konstantin Nikolaev National Research Center Kurchatov Institute (NRCKI), Russia Unnecessarily exotic approaches to the thin film metrology